Navegação Ciências Exatas e da Terra por Autor "Achete, Carlos A."
Resultados 1-2 de 2
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Nitrogen implantation into amorphous carbon films: sims and positron annihilation analyses
Freire Junior, Fernando Leite; Franceschini, Dante F.; Achete, Carlos A.; Baumvol, Israel Jacob Rabin; Brusa, R.S.; Mariotto, Gino; Canteri, R. (1996) [Artigo de periódico]Hard amorphous hydrogenated carbon films deposited by self-bias glow discharge were implanted at room temperature with 70 keV-nitrogen ions at fluences between 2.0 and 9.0 x 10 16 N/cm2. The implantation energy was chosen ... -
Unraveling structural and compositional information in 3D FinFET electronic devices
Trombini, Henrique; Marmitt, Gabriel Guterres; Vellame, Igor Alencar; Baptista, Daniel Lorscheitter; Reboh, Shay; Mazen, Frédéric; Pinheiro, Rafael Bortolin; Sanchez, Dario Ferreira; Senna, Carlos Alberto; Archanjo, Braulio Soares; Achete, Carlos A.; Grande, Pedro Luis (2019) [Artigo de periódico]Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a ...